Manufacturing MEMS devices requires adding new manufacturing steps to the standard IC process. These new steps require new, specialized equipment to maximize yield and productivity. XACTIX leverages its unique combination of expertise in instrument and equipment design, semiconductor materials processing, micro machining and fabrication, and MEMS manufacturing to design and build leading-edge MEMS process equipment
Xetch® Systems
XACTIX is the manufacturer of the Xetch® xenon difluoride (XeF2) etching systems, the X3 Series™ for commercial customers and the e1 Series™ for university customers and the newly introduced X3M and XT series.